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Material
Silicon
Germanium
GaAs
GaSb
GaP
InAs
InSb
InP
Diameter
Any
12"
8"
6"
5"
4"
3"
2"
1"
Type
Any
n
p
SI
Dopant
Any
As
B
Cd
Cr
Fe
Ga
Ge
P
S
S+Zn
Sb
Si
Te
Zn
Intrinsic
Orientation
Any
100
110
111
Other
Thick. [µm]
±50
Surface
Any
DSP (P/P)
SSP (P/E)
as-Etched (E/E, RTP)
as-Lapped (L/L)
as-Cut (C/C)
Polished/Grinded
Back side oxide: present (SSP)
Both sides oxide: present (SSP)
Back side oxide: present (DSP)
Broken
Resistivity [Ohm-cm]
-
TTV
Any
<10µm
<9µm
<8µm
<7µm
<6µm
<5µm
<4µm
<3µm
<2µm
<1µm
Growth
Any
CZ
FZ
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